11/28/2010	1:50:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2010	1:50:34 PM	Recipe started at 1:50 PM
11/28/2010	1:50:34 PM	Helium valve closed
11/28/2010	1:50:34 PM	H2 valve closed
11/28/2010	1:50:34 PM	BCl3 valve closed
11/28/2010	1:50:34 PM	PH3 valve closed
11/28/2010	1:50:34 PM	SiCl4 pre valve closed
11/28/2010	1:50:34 PM	SiCl4 post valve closed
11/28/2010	1:50:34 PM	Main Vac valve closed
11/28/2010	1:50:34 PM	Bubbler valve closed
11/28/2010	1:50:34 PM	Bypass valve opened
11/28/2010	1:50:34 PM	Helium MFC set to  0.000000
11/28/2010	1:50:34 PM	H2 MFC set to  0.000000
11/28/2010	1:50:34 PM	BCl3 MFC set to  0.000000
11/28/2010	1:50:34 PM	PHl3 MFC set to  0.000000
11/28/2010	1:50:34 PM	SiCl4 MFC set to  0.000000
11/28/2010	1:50:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2010	1:50:34 PM	Tube furnace set to 0
11/28/2010	1:51:24 PM	Helium valve closed
11/28/2010	1:51:24 PM	H2 valve closed
11/28/2010	1:51:24 PM	BCl3 valve closed
11/28/2010	1:51:24 PM	PH3 valve closed
11/28/2010	1:51:24 PM	SiCl4 pre valve closed
11/28/2010	1:51:24 PM	SiCl4 post valve closed
11/28/2010	1:51:24 PM	Bubbler valve closed
11/28/2010	1:51:24 PM	Main Vac valve opened
11/28/2010	1:51:24 PM	Bypass valve opened
11/28/2010	1:51:24 PM	Helium MFC set to  0.000000
11/28/2010	1:51:24 PM	H2 MFC set to  0.000000
11/28/2010	1:51:24 PM	BCl3 MFC set to  0.000000
11/28/2010	1:51:24 PM	PHl3 MFC set to  0.000000
11/28/2010	1:51:24 PM	SiCl4 MFC set to  0.000000
11/28/2010	1:51:24 PM	Bypass solenoid MFC set to  0.000000
11/28/2010	1:51:25 PM	Tube furnace set to 0
11/28/2010	1:51:25 PM	Run finished at 1:51 PM
11/28/2010	1:51:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
